公开(公告)号：US06628078B2

公开(公告)日：2003-09-30

申请号：US09750740

申请日：2000-12-29

Applicant: Sadatoshi Inayoshi

Inventor： Sadatoshi Inayoshi

IPC: H01J1100

CPC classification number: H01J65/00 ,  B08B7/0057

Abstract: A dry cleaning device which uses a double-cylinder type dielectric barrier discharge lamp 10a, 10b as a ultraviolet source. An outside electrode 2 in a trough-like shape is tightly contacted with the outer tube 1a of a discharge container 1, reflecting the ultraviolet light and directs it toward a workpiece 40. A cover 3 covers the outside electrode 2 for insulation of the outside electrode 2 from the ozone. In the clearance between the outer tube 1a of the discharge container 1 and an N2 introduction tube, an inside electrode 6 in a net-like shape is accommodated, nitrogen (N2) gas is caused to flow through the clearance for cooling the lamp 10a, 10b.

Abstract translation: 使用双筒型电介质阻挡放电灯10a，10b作为紫外线源的干洗装置。 槽状的外部电极2与放电容器1的外管1a紧密接触，反射紫外线并将其引向工件40.盖3覆盖外部电极2，用于绝缘外部电极 2从臭氧。 在排出容器1的外管1a和N2导入管之间的间隙中，容纳网状的内部电极6，使氮（N 2）气体流过用于冷却灯10a的间隙， 10b。

公开(公告)号：US06437494B1

公开(公告)日：2002-08-20

申请号：US09450909

申请日：1999-11-29

Applicant: Sadatoshi Inayoshi

Inventor： Sadatoshi Inayoshi

IPC: H01J2100

CPC classification number: H01J65/046

Abstract: At the outer boundary of a discharge container 1, a pair of opposed electrodes 3a and 4a and a pair of opposed electrodes 3b and 4b are disposed with a specified spacing being given between them, and to each pair of opposed electrodes, a high-frequency voltage is applied from a high-frequency, high-voltage power supply 8 through a limiting resistor 6a, 7a, and a limiting resistor 6b, 7b. Across each pair of opposed electrodes, a steamer of discharge plasma corresponding to the amperage of the discharge current is generated, however, by adjusting the resistance value of the above-mentioned limiting resistor 6a, 7a, and the resistance value of the limiting resistor 6b, 7b, the discharge current is appropriately set, and thus the streamers of discharge plasma generated across the pairs of opposed electrodes are made uniform. Because the pair of opposed electrodes is disposed eccentrically with respect to the axis of the discharge container 1, a creeping discharge can be developed on the inside wall in the vicinity of the electrodes or over the entire path of discharge, resulting in the “fluctuation” of the streamer being suppressed.

Abstract translation: 在放电容器1的外边界处，一对相对的电极3a和4a以及一对相对的电极3b和4b之间设有一定的间距，并且每对相对电极的高频 从高频，高压电源8通过限制电阻6a，7a和限制电阻6b，7b施加电压。 在每对相对的电极中，产生对应于放电电流的电流强度的放电等离子体的蒸笼，然而，通过调节上述限制电阻6a，7a的电阻值和限制电阻6b的电阻值 如图7b所示，放电电流被适当地设定，从而使成对的相对电极间产生的放电等离子体的飘带均匀。 由于一对相对的电极相对于放电容器1的轴线偏心地设置，所以可以在电极附近的内壁或整个放电路径上产生沿面放电，导致“波动” 的拖缆被压制。