公开(公告)号：US06479924B1

公开(公告)日：2002-11-12

申请号：US09636634

申请日：2000-08-11

Applicant: In-Kyeong Yoo

Inventor： In-Kyeong Yoo

IPC: H01J2100

CPC classification number: H01J1/30 ,  H01J2201/306

Abstract: A ferroelectric emitter is described. The ferroelectric emitter of the present invention includes a ferroelectric layer having a first side, an opposing second side, and a top surface, a first and a second electrode formed along the top surface of the ferroelectric layer, and a mask layer which has a predetermined pattern and is formed along the top surface of the ferroelectric layer between the first and second electrodes. When used in ferroelectric switching emission lithography, the ferroelectric emitter of the present invention allows electron emission from a wide or narrow gap of a mask layer and from an isolated pattern such as a doughnut shape while facilitating re-poling in pyroelectric electron emission.

Abstract translation: 描述了铁电发射器。 本发明的铁电体发射体包括具有第一面，相对的第二面以及顶面的强电介质层，沿铁电体层的上表面形成的第一电极和第二电极，以及具有规定的 并且沿着铁电层的顶表面在第一和第二电极之间形成。 当用于铁电开关发射光刻时，本发明的铁电发射体允许从掩模层的宽或窄间隙以及诸如环形形状的隔离图案发射电子，同时促进热电子发射中的再极化。

公开(公告)号：US06437494B1

公开(公告)日：2002-08-20

申请号：US09450909

申请日：1999-11-29

Applicant: Sadatoshi Inayoshi

Inventor： Sadatoshi Inayoshi

IPC: H01J2100

CPC classification number: H01J65/046

Abstract: At the outer boundary of a discharge container 1, a pair of opposed electrodes 3a and 4a and a pair of opposed electrodes 3b and 4b are disposed with a specified spacing being given between them, and to each pair of opposed electrodes, a high-frequency voltage is applied from a high-frequency, high-voltage power supply 8 through a limiting resistor 6a, 7a, and a limiting resistor 6b, 7b. Across each pair of opposed electrodes, a steamer of discharge plasma corresponding to the amperage of the discharge current is generated, however, by adjusting the resistance value of the above-mentioned limiting resistor 6a, 7a, and the resistance value of the limiting resistor 6b, 7b, the discharge current is appropriately set, and thus the streamers of discharge plasma generated across the pairs of opposed electrodes are made uniform. Because the pair of opposed electrodes is disposed eccentrically with respect to the axis of the discharge container 1, a creeping discharge can be developed on the inside wall in the vicinity of the electrodes or over the entire path of discharge, resulting in the “fluctuation” of the streamer being suppressed.

Abstract translation: 在放电容器1的外边界处，一对相对的电极3a和4a以及一对相对的电极3b和4b之间设有一定的间距，并且每对相对电极的高频 从高频，高压电源8通过限制电阻6a，7a和限制电阻6b，7b施加电压。 在每对相对的电极中，产生对应于放电电流的电流强度的放电等离子体的蒸笼，然而，通过调节上述限制电阻6a，7a的电阻值和限制电阻6b的电阻值 如图7b所示，放电电流被适当地设定，从而使成对的相对电极间产生的放电等离子体的飘带均匀。 由于一对相对的电极相对于放电容器1的轴线偏心地设置，所以可以在电极附近的内壁或整个放电路径上产生沿面放电，导致“波动” 的拖缆被压制。

公开(公告)号：US06534912B1

公开(公告)日：2003-03-18

申请号：US09311069

申请日：1999-05-13

Applicant: Sadao Takano ,  Akihiro Mihira ,  Akihiro Azeta ,  Toshihide Hirayama ,  Kenichi Honda

Inventor： Sadao Takano ,  Akihiro Mihira ,  Akihiro Azeta ,  Toshihide Hirayama ,  Kenichi Honda

IPC: H01J2100

CPC classification number: H01J29/085 ,  H01J31/126

Abstract: An active matrix drive fluorescent display device capable of preventing misluminescence of phosphor layers. A semiconductor chip which includes a plurality of luminous dots arranged in a matrix-like manner and is arranged in an envelope is covered on a cut surface thereof rendered electrically GND with an insulating cover layer. Such construction eliminates a failure in insulation between electrodes arranged on the semiconductor chip, to thereby prevent misluminescence of the luminous dots, leading to an increase in display quality.

Abstract translation: 一种能够防止荧光体层发光的有源矩阵驱动荧光显示装置。 包括以矩阵状布置并布置在外壳中的多个发光点的半导体芯片被覆盖在具有绝缘覆盖层的电GND的切割表面上。 这样的结构消除了布置在半导体芯片上的电极之间的绝缘失败，从而防止发光点的发光，导致显示质量的提高。

公开(公告)号：US06392240B1

公开(公告)日：2002-05-21

申请号：US09262866

申请日：1999-03-05

Applicant: Naoaki Aizaki

Inventor： Naoaki Aizaki

IPC: H01J2100

CPC classification number: G03F7/707 ,  G03F7/70708 ,  G03F7/70783

Abstract: A sample table for use in a pattern exposure machine configured to transfer a circuit pattern formed in a mask onto a sample. The sample table is divided into a center part and a peripheral part surrounding the center part. The center part and the peripheral part include a chuck mechanism for attracting the sample, respectively. A portion or the whole of the peripheral part are movable in a radial direction of the sample table in a condition that the sample is attracted to the peripheral part of the sample table. Thus, the invention operates such that when the pattern on the sample has become smaller or larger than a mask pattern, the sample, such as a silicon substrate, is expanded or contracted for a shortened time to obtain a desired.

Abstract translation: 一种用于图案曝光机的样品台，其被配置为将形成在掩模中的电路图案转印到样品上。 样品台分为围绕中心部分的中心部分和周边部分。 中心部分和周边部分分别包括用于吸引样品的卡盘机构。 周边部分的一部分或全部可以在样品被吸引到样品台的周边部分的条件下沿样品台的径向方向移动。 因此，本发明的操作使得当样品上的图案变得比掩模图案变得更小或更大时，诸如硅衬底的样品在缩短的时间内膨胀或收缩以获得期望的。