Dynamic provisional decomposition of lithographic patterns having different interaction ranges
    1.
    发明授权
    Dynamic provisional decomposition of lithographic patterns having different interaction ranges 有权
    具有不同相互作用范围的光刻图案的动态临时分解

    公开(公告)号:US08266554B2

    公开(公告)日:2012-09-11

    申请号:US13204440

    申请日:2011-08-05

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36 G03F1/68

    摘要: A method for obtaining mask and source patterns for printing integrated circuit patterns includes providing initial representations of a plurality of mask and source patterns. The method identifies long-range and short-range factors in the representations of the plurality of mask and source patterns, and provides a plurality of clips including a specified number of mask patterns. Short-range factors having overlapping ranges for each of the clips are specified. The method includes determining an initial processing priority for the plurality of clips, and determining a patterning relationship between integrated circuit patterns and the mask and source patterns. A primary objective is determined which expresses the printability of the integrated circuit patterns in terms of the patterning relationship. The method defines and iteratively solves a master problem employing the primary objective to generate values for the long-range factors, and solves subproblems employing a second objective for generating values for the short-range factors.

    摘要翻译: 用于获得用于打印集成电路图案的掩模和源图案的方法包括提供多个掩模和源图案的初始表示。 该方法识别多个掩模和源图案的表示中的长距离和短距离因子,并且提供包括指定数量的掩模图案的多个剪辑。 指定具有每个剪辑的重叠范围的短距离因子。 该方法包括确定多个剪辑的初始处理优先级,以及确定集成电路图案与掩模和源图案之间的图案化关系。 根据图案化关系确定表示集成电路图案的可印刷性的主要目的。 该方法定义并迭代地解决了使用主要目标生成长距离因子值的主问题,并且解决了使用第二个目标生成短距离因子值的子问题。

    DYNAMIC PROVISIONAL DECOMPOSITION OF LITHOGRAPHIC PATTERNS HAVING DIFFERENT INTERACTION RANGES
    2.
    发明申请
    DYNAMIC PROVISIONAL DECOMPOSITION OF LITHOGRAPHIC PATTERNS HAVING DIFFERENT INTERACTION RANGES 有权
    具有不同相互作用范围的平面图的动态临时分解

    公开(公告)号:US20120047471A1

    公开(公告)日:2012-02-23

    申请号:US13204440

    申请日:2011-08-05

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36 G03F1/68

    摘要: A method for obtaining mask and source patterns for printing integrated circuit patterns includes providing initial representations of a plurality of mask and source patterns. The method identifies long-range and short-range factors in the representations of the plurality of mask and source patterns, and provides a plurality of clips including a specified number of mask patterns. Short-range factors having overlapping ranges for each of the clips are specified. The method includes determining an initial processing priority for the plurality of clips, and determining a patterning relationship between integrated circuit patterns and the mask and source patterns. A primary objective is determined which expresses the printability of the integrated circuit patterns in terms of the patterning relationship. The method defines and iteratively solves a master problem employing the primary objective to generate values for the long-range factors, and solves subproblems employing a second objective for generating values for the short-range factors.

    摘要翻译: 用于获得用于打印集成电路图案的掩模和源图案的方法包括提供多个掩模和源图案的初始表示。 该方法识别多个掩模和源图案的表示中的长距离和短距离因子,并且提供包括指定数量的掩模图案的多个剪辑。 指定具有每个剪辑的重叠范围的短距离因子。 该方法包括确定多个剪辑的初始处理优先级,以及确定集成电路图案与掩模和源图案之间的图案化关系。 根据图案化关系确定表示集成电路图案的可印刷性的主要目的。 该方法定义并迭代地解决了使用主要目标生成长距离因子值的主问题,并且解决了使用第二个目标生成短距离因子值的子问题。

    SYSTEM AND METHOD FOR PROCESSING REGULAR EXPRESSIONS USING SIMD AND PARALLEL STREAMS
    3.
    发明申请
    SYSTEM AND METHOD FOR PROCESSING REGULAR EXPRESSIONS USING SIMD AND PARALLEL STREAMS 审中-公开
    使用SIMD和并行流处理正则表达式的系统和方法

    公开(公告)号:US20110302394A1

    公开(公告)日:2011-12-08

    申请号:US12795874

    申请日:2010-06-08

    IPC分类号: G06F9/302

    CPC分类号: G06F9/3887 G06F9/30007

    摘要: A system and method for performing regular expression computations includes loading a plurality of input values corresponding to one or more input streams as elements of a vector register implemented on programmable storage media. New state indexes are computed using the input values, and current state values corresponding to different automata by using single instruction, multiple data (SIMD) vector operations. New state values associated with the different automata are determined using the new state indexes to look up new state values such that state transitions for a plurality of regular expressions are processed concurrently.

    摘要翻译: 用于执行正则表达式计算的系统和方法包括将对应于一个或多个输入流的多个输入值作为在可编程存储介质上实现的向量寄存器的元素进行加载。 通过使用单指令,多数据(SIMD)向量运算,使用输入值和与不同自动机对应的当前状态值计算新状态指标。 使用新的状态索引来确定与不同自动机相关联的新状态值以查找新的状态值,使得多个正则表达式的状态转换被并发处理。