Schottky diode with silicide anode and anode-encircling P-type doped region
    1.
    发明授权
    Schottky diode with silicide anode and anode-encircling P-type doped region 有权
    肖特基二极管与硅化物阳极和阳极环绕P型掺杂区域

    公开(公告)号:US08129814B2

    公开(公告)日:2012-03-06

    申请号:US13085102

    申请日:2011-04-12

    IPC分类号: H01L27/095 H01L29/792

    摘要: An integrated circuit includes a Schottky diode having a cathode defined by an n-type semiconductor region, an anode defined by a cobalt silicide region, and a p-type region laterally annularly encircling the cobalt silicide region. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation. An n+-type contact region is laterally separated by the p-type region from the first silicide region and a second cobalt silicide region is formed in the n-type contact region. The silicided regions are defined by openings in a silicon blocking dielectric layer. Dielectric material is left over the p-type region. The p-type region may be formed simultaneously with source/drain regions of a PMOS transistor.

    摘要翻译: 集成电路包括具有由n型半导体区域限定的阴极的肖特基二极管,由硅化钴区域限定的阳极和横向环形地环绕硅化钴区域的p型区域。 所得的p-n结在肖特基结下形成耗尽区,在反向偏压操作中减少穿过肖特基二极管的漏电流。 n +型接触区域由p型区域与第一硅化物区域横向分离,并且在n型接触区域中形成第二钴硅化物区域。 硅化区域由硅阻挡介电层中的开口限定。 电介质材料留在p型区域上。 p型区域可以与PMOS晶体管的源极/漏极区域同时形成。

    SCHOTTKY DIODE WITH SILICIDE ANODE AND ANODE-ENCIRCLING P-TYPE DOPED REGION
    2.
    发明申请
    SCHOTTKY DIODE WITH SILICIDE ANODE AND ANODE-ENCIRCLING P-TYPE DOPED REGION 有权
    肖特基二氧化硅与阳极阳极和阳极氧化P型掺杂区域

    公开(公告)号:US20110186933A1

    公开(公告)日:2011-08-04

    申请号:US13085102

    申请日:2011-04-12

    IPC分类号: H01L27/06 H01L29/872

    摘要: An integrated circuit includes a Schottky diode having a cathode defined by an n-type semiconductor region, an anode defined by a cobalt silicide region, and a p-type region laterally annularly encircling the cobalt silicide region. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation. An n+-type contact region is laterally separated by the p-type region from the first silicide region and a second cobalt silicide region is formed in the n-type contact region. The silicided regions are defined by openings in a silicon blocking dielectric layer. Dielectric material is left over the p-type region. The p-type region may be formed simultaneously with source/drain regions of a PMOS transistor.

    摘要翻译: 集成电路包括具有由n型半导体区域限定的阴极的肖特基二极管,由硅化钴区域限定的阳极和横向环形地环绕硅化钴区域的p型区域。 所得的p-n结在肖特基结下形成耗尽区,在反向偏压操作中减少穿过肖特基二极管的漏电流。 n +型接触区域由p型区域与第一硅化物区域横向分离,并且在n型接触区域中形成第二钴硅化物区域。 硅化区域由硅阻挡介电层中的开口限定。 电介质材料留在p型区域上。 p型区域可以与PMOS晶体管的源极/漏极区域同时形成。

    CoSi2 Schottky diode integration in BiSMOS process
    4.
    发明授权
    CoSi2 Schottky diode integration in BiSMOS process 有权
    CoSi2肖特基二极管整合在BiSMOS工艺中

    公开(公告)号:US07943472B2

    公开(公告)日:2011-05-17

    申请号:US12023190

    申请日:2008-01-31

    IPC分类号: H01L21/329 H01L21/20

    摘要: Cobalt silicide (CoSi2) Schottky diodes fabricated per the current art suffer from excess leakage currents in reverse bias. In this invention, an floating p-type region encircles each anode of a CoSi2 Schottky diode comprising of one or more CoSi2 anodes. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation.

    摘要翻译: 根据当前技术制造的硅化硅(CoSi 2)肖特基二极管在反向偏压下遭受过量的漏电流。 在本发明中,浮动p型区域包围由一个或多个CoSi 2阳极组成的CoSi 2肖特基二极管的每个阳极。 所得的p-n结在肖特基结下形成耗尽区,在反向偏压操作中减少穿过肖特基二极管的漏电流。