摘要:
An integrated circuit includes a Schottky diode having a cathode defined by an n-type semiconductor region, an anode defined by a cobalt silicide region, and a p-type region laterally annularly encircling the cobalt silicide region. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation. An n+-type contact region is laterally separated by the p-type region from the first silicide region and a second cobalt silicide region is formed in the n-type contact region. The silicided regions are defined by openings in a silicon blocking dielectric layer. Dielectric material is left over the p-type region. The p-type region may be formed simultaneously with source/drain regions of a PMOS transistor.
摘要翻译:集成电路包括具有由n型半导体区域限定的阴极的肖特基二极管,由硅化钴区域限定的阳极和横向环形地环绕硅化钴区域的p型区域。 所得的p-n结在肖特基结下形成耗尽区,在反向偏压操作中减少穿过肖特基二极管的漏电流。 n +型接触区域由p型区域与第一硅化物区域横向分离,并且在n型接触区域中形成第二钴硅化物区域。 硅化区域由硅阻挡介电层中的开口限定。 电介质材料留在p型区域上。 p型区域可以与PMOS晶体管的源极/漏极区域同时形成。
摘要:
An integrated circuit includes a Schottky diode having a cathode defined by an n-type semiconductor region, an anode defined by a cobalt silicide region, and a p-type region laterally annularly encircling the cobalt silicide region. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation. An n+-type contact region is laterally separated by the p-type region from the first silicide region and a second cobalt silicide region is formed in the n-type contact region. The silicided regions are defined by openings in a silicon blocking dielectric layer. Dielectric material is left over the p-type region. The p-type region may be formed simultaneously with source/drain regions of a PMOS transistor.
摘要翻译:集成电路包括具有由n型半导体区域限定的阴极的肖特基二极管,由硅化钴区域限定的阳极和横向环形地环绕硅化钴区域的p型区域。 所得的p-n结在肖特基结下形成耗尽区,在反向偏压操作中减少穿过肖特基二极管的漏电流。 n +型接触区域由p型区域与第一硅化物区域横向分离,并且在n型接触区域中形成第二钴硅化物区域。 硅化区域由硅阻挡介电层中的开口限定。 电介质材料留在p型区域上。 p型区域可以与PMOS晶体管的源极/漏极区域同时形成。
摘要:
Cobalt silicide (CoSi2) Schottky diodes fabricated per the current art suffer from excess leakage currents in reverse bias. In this invention, an floating p-type region encircles each anode of a CoSi2 Schottky diode comprising of one or more CoSi2 anodes. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation.
摘要:
Cobalt silicide (CoSi2) Schottky diodes fabricated per the current art suffer from excess leakage currents in reverse bias. In this invention, an floating p-type region encircles each anode of a CoSi2 Schottky diode comprising of one or more CoSi2 anodes. The resulting p-n junction forms a depletion region under the Schottky junction that reduces leakage current through the Schottky diodes in reverse bias operation.