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公开(公告)号:US20240324320A1
公开(公告)日:2024-09-26
申请号:US18517068
申请日:2023-11-22
Applicant: Samsung Display Co., LTD.
Inventor: Ki Won KIM , Jeong Ju PARK , Seung Sok SON , Kap Soo YOON , Woo Geun LEE , Ji Yun HONG
IPC: H10K59/123 , H10K59/12 , H10K71/60
CPC classification number: H10K59/123 , H10K59/1201 , H10K71/60
Abstract: A method for fabricating a display device includes providing a substrate into a chamber; forming an active material layer on the substrate by a plurality of deposition processes in the chamber; forming an active layer by patterning the active material layer: forming a transistor including a gate electrode overlapping the active layer; and forming a pixel electrode on the transistor, at least two deposition processes among the plurality of deposition processes are performed by applying different magnitudes of power, respectively.