公开(公告)号：US20240324320A1

公开(公告)日：2024-09-26

申请号：US18517068

申请日：2023-11-22

Applicant: Samsung Display Co., LTD.

Inventor： Ki Won KIM ,  Jeong Ju PARK ,  Seung Sok SON ,  Kap Soo YOON ,  Woo Geun LEE ,  Ji Yun HONG

IPC: H10K59/123 ,  H10K59/12 ,  H10K71/60

CPC classification number: H10K59/123 ,  H10K59/1201 ,  H10K71/60

Abstract: A method for fabricating a display device includes providing a substrate into a chamber; forming an active material layer on the substrate by a plurality of deposition processes in the chamber; forming an active layer by patterning the active material layer: forming a transistor including a gate electrode overlapping the active layer; and forming a pixel electrode on the transistor, at least two deposition processes among the plurality of deposition processes are performed by applying different magnitudes of power, respectively.