公开(公告)号：US12211712B2

公开(公告)日：2025-01-28

申请号：US18585352

申请日：2024-02-23

Applicant: Samsung Display Co., LTD.

Inventor： Jong Jang Park ,  Seok Soon Back ,  Sung Hune Yoo

IPC: H01L21/67 ,  H01L27/12

Abstract: An apparatus for manufacturing a display device includes a chamber, a heating member disposed inside the chamber to provide a thermal atmosphere inside the chamber, where the heating member includes a first heater and a second heater facing each other, a height adjustment member including an end disposed between the first heater and the second heater, and a driving unit which drives the end of the height adjustment member to move up or down such that the end of the height adjustment member is located at one of a first height and a second height which are different heights between the first heater and the second heater. Each of the first height and the second height is different from a height of a top surface of the first heater, and different from a height of a bottom surface of the second heater facing the top surface of the first heater.

公开(公告)号：US11942338B2

公开(公告)日：2024-03-26

申请号：US17348316

申请日：2021-06-15

Applicant: Samsung Display Co., LTD.

Inventor： Jong Jang Park ,  Seok Soon Back ,  Sung Hune Yoo

IPC: H01L21/67 ,  H01L27/12

CPC classification number: H01L21/67109 ,  H01L27/1259

Abstract: An apparatus for manufacturing a display device includes a chamber, a heating member disposed inside the chamber to provide a thermal atmosphere inside the chamber, where the heating member includes a first heater and a second heater facing each other, a height adjustment member including an end disposed between the first heater and the second heater, and a driving unit which drives the end of the height adjustment member to move up or down such that the end of the height adjustment member is located at one of a first height and a second height which are different heights between the first heater and the second heater. Each of the first height and the second height is different from a height of a top surface of the first heater, and different from a height of a bottom surface of the second heater facing the top surface of the first heater.