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公开(公告)号:US20250105229A1
公开(公告)日:2025-03-27
申请号:US18633832
申请日:2024-04-12
Applicant: Samsung Display Co., LTD.
Inventor: Tetsuhiro TANAKA , Jin Seok OH , Chang Ha KWAK , Jung Yub SEO , Jung Hoon YOON , Jin Ho JEONG
IPC: H01L25/16 , H01L25/075 , H01L27/12 , H01L33/54
Abstract: A display device includes a transistor including an active layer disposed on a substrate and a gate electrode disposed on the active layer, a gate insulating layer disposed between the active layer and the gate electrode, and a first insulating layer disposed on the gate electrode. The first insulating layer may include a first layer covering the active layer, the gate insulating layer, and the gate electrode and including silicon oxide, a second layer disposed on the first layer and including silicon oxynitride, and a third layer disposed on the second layer and including silicon nitride.