公开(公告)号：US12083546B2

公开(公告)日：2024-09-10

申请号：US17869593

申请日：2022-07-20

Applicant: Samsung Display Co., LTD.

Inventor： Min Ho Bae ,  Hyun Jin Kim ,  Sang Hoon Back ,  Hae Wook Yang ,  Yong Hwan Kim ,  Jong Hyup Kim

IPC: B05B13/02

CPC classification number: B05B13/0242

Abstract: A coating device includes: a stage transfer part including a first long shaft extending in a first direction and a second long shaft extending in a second direction intersecting the first direction; a stage tilting part disposed on the stage transfer part, where the stage tiling part swings about a first swing axis; a stage rotating part disposed on the stage tilting part, where the stage rotating part rotates about a first rotating axis intersecting the first swing axis; a stage aligning part disposed on the stage rotating part, where the stage aligning part includes a first short shaft extending in the first direction and a second short shaft extending in the second direction; and a stage disposed on the stage aligning part, wherein a coating target is seated on the stage, where the stage includes a monitoring camera disposed in a camera seating space defined inside the stage.

公开(公告)号：US10601346B2

公开(公告)日：2020-03-24

申请号：US15797488

申请日：2017-10-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Min Ho Bae ,  Byung-Moo Kim ,  Yun Soo Kim ,  Tae-Ho Youn

IPC: H02N13/00 ,  H01L21/68 ,  H01L21/683 ,  H01L21/687

Abstract: An electrostatic chuck and an electrostatic adsorption apparatus are provided. According to one or more exemplary embodiments, an electrostatic chuck includes: a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole; a transparent cushion layer on the main body portion and covering the transparent resin portion; an electrode layer on the transparent cushion layer; and a dielectric layer on the electrode layer.

公开(公告)号：US11309205B2

公开(公告)日：2022-04-19

申请号：US16591369

申请日：2019-10-02

Applicant: Samsung Display Co., Ltd.

Inventor： Min Ho Bae ,  Hyok Keo Se Kwon ,  Tae Ho Youn

IPC: H01L21/683 ,  H01L21/67

Abstract: An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.