公开(公告)号：US20230037161A1

公开(公告)日：2023-02-02

申请号：US17966256

申请日：2022-10-14

Applicant: Samsung Display Co., LTD.

Inventor： Soo Young JUNG ,  Joon Hyung KIM ,  Jeong Mok KIM ,  Chung Hyuk LEE ,  Sung Jae JUNG

IPC: H01L27/12 ,  H01L21/67 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66 ,  H01L21/687

Abstract: A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.

公开(公告)号：US20210249452A1

公开(公告)日：2021-08-12

申请号：US16938426

申请日：2020-07-24

Applicant: Samsung Display Co., LTD.

Inventor： Soo Young JUNG ,  Joon Hyung KIM ,  Jeong Mok KIM ,  Chung Hyuk LEE ,  Sung Jae JUNG

IPC: H01L27/12 ,  H01L21/67 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66

Abstract: A manufacturing apparatus and a manufacturing method are provided. A manufacturing apparatus includes a chamber, and a stage disposed in the chamber. The stage includes an upper surface on which a target substrate is disposed, a lower surface opposite to the upper surface, a first side surface extending between the upper surface and the lower surface in a first direction, and a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction. The first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage.