公开(公告)号：US12288709B2

公开(公告)日：2025-04-29

申请号：US17685298

申请日：2022-03-02

Applicant: Samsung Display Co., LTD. ,  ULVAC, INC.

Inventor： Kyung Hoon Chung ,  Masao Nishiguchi ,  Daisuke Iwase ,  Ki Jun Roh ,  Man Soo Jang

IPC: H01L21/67 ,  H01L21/677

Abstract: A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction; and a position conversion chamber connected to a first transport chamber among the transport chambers. The transport chambers include a rotational movement stage that rotates about a rotation axis that is perpendicular to the first direction and the second direction, and moves along a plane formed by the first direction and the second direction.