-
公开(公告)号:US20200156188A1
公开(公告)日:2020-05-21
申请号:US16547354
申请日:2019-08-21
Applicant: Samsung Display Co., Ltd.
Inventor: Byeong Nam MOON , Yong Woo KIM , Ki Hong LIM , Kyoung Suk KIM , Seung Kuk LEE
IPC: B23K26/38 , H01L21/67 , H01L21/687
Abstract: There are provided a stage for cutting a substrate, and a substrate-cutting apparatus. The stage includes a supporting member for having the substrate mounted thereon, including a plurality of cell areas, and defining a groove line having a groove shape between the plurality of cell areas, and a first tube line inserted into the groove line to contact an inner wall of the groove line, and having an open upper portion.