公开(公告)号：US20230417681A1

公开(公告)日：2023-12-28

申请号：US18107648

申请日：2023-02-09

Applicant: Samsung Display Co., Ltd.

Inventor： SUNGWOO JUNG ,  HYEONSUK GUAK ,  JAEWOO JUNG

IPC: G01N21/95 ,  G01N21/88 ,  G01N21/55

CPC classification number: G01N21/95 ,  G01N21/8806 ,  G01N21/55 ,  G01N2201/0633

Abstract: An inspection system includes: a single light source part which irradiates an incident light to an inspection object; a main lens through which reflected light, reflected from an inspection object and including a first polarization component and a second polarization component, passes; a beam splitter which splits a reflected light passing through a main lens into a first split light and a second split light; a first polarizer including a first filter area which selectively passes a first polarization component therethrough; a second polarizer including a second filter area which selectively passes a second polarization component therethrough; and an image sensor which generates a first captured image for a first polarization component and a second captured image for a second polarization component.