公开(公告)号：US20140291665A1

公开(公告)日：2014-10-02

申请号：US14180171

申请日：2014-02-13

Applicant: Samsung Display Co., Ltd.

Inventor： Gun Hee KIM ,  Jin Hyun PARK ,  Kyoung Won LEE ,  Byung Du AHN ,  Jee-Hun LIM ,  Jun Hyung LIM

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L29/7869 ,  H01L27/1225 ,  H01L27/1288

Abstract: A thin film transistor array panel includes: a gate electrode disposed on a substrate, an insulating layer disposed on the gate electrode, an oxide semiconductor disposed on the gate insulating layer, source electrode overlapping a portion of the oxide semiconductor, a drain electrode overlapping another portion of the oxide semiconductor; and a buffer layer disposed between the oxide semiconductor and the source electrode and between the oxide semiconductor and the drain electrode. The buffer layer comprises tin as a doping material. A weight percent of the doping material is greater than approximately 0% and less than or equal to approximately 20%.

Abstract translation: 薄膜晶体管阵列面板包括：设置在基板上的栅极电极，设置在栅电极上的绝缘层，设置在栅极绝缘层上的氧化物半导体，与氧化物半导体的一部分重叠的源电极，与另一个重叠的漏电极 部分氧化物半导体; 以及设置在氧化物半导体和源电极之间以及氧化物半导体和漏电极之间的缓冲层。 缓冲层包含锡作为掺杂材料。 掺杂材料的重量百分比大于约0％且小于或等于约20％。