公开(公告)号：US20150346107A1

公开(公告)日：2015-12-03

申请号：US14530952

申请日：2014-11-03

Applicant: Samsung Display Co., Ltd.

Inventor： Wal Jun KIM ,  Seung Young BAECK

IPC: G01N21/88 ,  G01N21/94 ,  G01N21/95

CPC classification number: G01N21/958 ,  G01N21/84 ,  G01N21/8422 ,  G01N21/88 ,  G01N21/94 ,  G01N2021/8438 ,  G01N2201/068

Abstract: An inspecting apparatus includes: a stage including a top surface on which a multilayer structure comprising a first layer and a second layer is placed; a first light irradiation unit which faces a first side surface of the multilayer structure and provides light to a first side surface of the first layer or a first side surface of the second layer; an image capture unit which is on the stage, receives scattered light from the multilayer structure and generates image information of the multilayer structure from the received scattered light, and a control unit which detects foreign body information of the multilayer structure based on the image information of the multilayer structure. The scattered light comprises the light which is provided from the first light irradiation unit and is scattered within the multilayer structure.

Abstract translation: 检查装置包括：包括顶表面的台，其上放置包括第一层和第二层的多层结构; 第一光照射单元，其面对所述多层结构的第一侧表面，并且向所述第一层的第一侧表面或所述第二层的第一侧表面提供光; 在所述平台上的图像拍摄单元从所述多层结构接收散射光，并从所接收的散射光生成所述多层结构的图像信息;以及控制单元，其基于所述多层结构的图像信息检测所述多层结构的异物信息 多层结构。 散射光包括从第一光照射单元提供并在多层结构内散射的光。