公开(公告)号：US20150085200A1

公开(公告)日：2015-03-26

申请号：US14247873

申请日：2014-04-08

Applicant: Samsung Display Co., Ltd.

Inventor： Suk Choi ,  Sung-Mo Gu ,  Youngjin Noh ,  Youngwon Kim ,  Changhyun Ryu ,  Chi Youn Chung ,  Seunghee Lee ,  Young Eun Choi

IPC: G02F1/1337 ,  G02F1/13

CPC classification number: G02F1/1309 ,  G01N21/8806 ,  G01N2021/8848 ,  G01N2021/9513 ,  G01N2201/067 ,  G02F1/1303 ,  G02F2001/133773

Abstract: An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.

Abstract translation: 提供了用于检测基板的缺陷的检查装置。 检查装置包括液晶调制器，发光单元，分束器和测量单元。 液晶调制器包括反射层，液晶层，电极和偏振器。 反射层反射光。 传感器层包括混合排列向列型液晶。 电极设置在液晶层上。 偏振器设置在电极上。

公开(公告)号：US09581842B2

公开(公告)日：2017-02-28

申请号：US14247873

申请日：2014-04-08

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Suk Choi ,  Sung-Mo Gu ,  Youngjin Noh ,  Youngwon Kim ,  Changhyun Ryu ,  Chi Youn Chung ,  Seunghee Lee ,  Young Eun Choi

IPC: G02F1/13 ,  G01N21/88 ,  G02F1/1337 ,  G01N21/95

CPC classification number: G02F1/1309 ,  G01N21/8806 ,  G01N2021/8848 ,  G01N2021/9513 ,  G01N2201/067 ,  G02F1/1303 ,  G02F2001/133773

Abstract: An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.

Abstract translation: 提供了用于检测基板的缺陷的检查装置。 检查装置包括液晶调制器，发光单元，分束器和测量单元。 液晶调制器包括反射层，液晶层，电极和偏振器。 反射层反射光。 传感器层包括混合排列向列型液晶。 电极设置在液晶层上。 偏振器设置在电极上。