公开(公告)号：US20220380668A1

公开(公告)日：2022-12-01

申请号：US17826064

申请日：2022-05-26

申请人： Samsung Display Co., Ltd.

发明人： Jong Hee PARK ,  Hyoung Sik KIM ,  Sang Hyuk LEE ,  Yong Hoe KIM ,  Young Kwang KIM ,  Dong Ho KANG ,  Hyun-Cheol SHIN ,  Sung-Tae KIM ,  Dong Hun LEE ,  Min Hye LEE ,  Byung Su LEE ,  Ki Su JUNG

IPC分类号： C09K13/06 ,  H01L27/32 ,  H01L51/00 ,  H01L51/52 ,  H01L51/56

摘要： An etchant composition includes: an inorganic acid compound at 9.0 wt % to 9.9 wt %; an inorganic salt compound at 5.0 wt % to 10.0 wt %; an organic acid compound at 35 wt % to 45 wt %; a lactate-based compound at 10 wt % to 20 wt %; a nitrogen cyclic compound containing oxygen at 0.1 wt % to 1.0 wt %; and a remaining amount of water such that a total weight of the etchant composition is 100 wt %, wherein the inorganic acid compound is an etchant composition having an acid dissociation constant (pKa) value of −1.0 to −3.0.