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公开(公告)号:US10941342B2
公开(公告)日:2021-03-09
申请号:US16505712
申请日:2019-07-09
发明人: Bong Kyun Kim , Jin Suek Kim , Seung Bo Shim , Shin Hyuk Choi , Seung Hee Kim , Dong Hee Lee , In Seol Kuk , Beom Soo Kim , Sang Tae Kim , Young Chul Park , Young Jin Yoon , Dae Sung Lim
摘要: An etchant composition may include: a peroxosulfate; a cyclic amine compound; a first amphoteric compound including a carboxyl group; and a second amphoteric compound including a sulfone group, wherein the second amphoteric compound may be different from the first amphoteric compound.
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公开(公告)号:US20200024516A1
公开(公告)日:2020-01-23
申请号:US16505712
申请日:2019-07-09
发明人: Bong Kyun KIM , Jin Suek Kim , Seung Bo Shim , Shin Hyuk Choi , Seung Hee Kim , Dong Hee Lee , In Seol Kuk , Beom Soo Kim , Sang Tae Kim , Young Chul Park , Young Jin Yoon , Dae Sung Lim
摘要: An etchant composition may include: a peroxosulfate; a cyclic amine compound; a first amphoteric compound including a carboxyl group; and a second amphoteric compound including a sulfone group, wherein the second amphoteric compound may be different from the first amphoteric compound.
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