公开(公告)号：US20230280276A1

公开(公告)日：2023-09-07

申请号：US18151948

申请日：2023-01-09

Applicant: Samsung Display Co., Ltd. ,  Nanophoton Korea

Inventor： YONG WOON LIM ,  Hyo-Jin KIM ,  Tae Hyun KIM ,  Hye Kyung SHIN ,  Kyonghun LEE

IPC: G01N21/65 ,  G01J3/44 ,  G01J3/02

CPC classification number: G01N21/65 ,  G01J3/4412 ,  G01J3/0216

Abstract: An analysis apparatus includes a laser irradiation unit that irradiates a laser beam, a beam scanner that moves along a pattern to change a position at which the laser beam is irradiated to a sample, a first lens through which a light provided from the sample is transmitted, an optical member to which the light that passes through the first lens is provided and through which a pin hole is defined, and a detection unit that detects a detection light passed through the pin hole.