公开(公告)号：US20150153593A1

公开(公告)日：2015-06-04

申请号：US14316525

申请日：2014-06-26

Applicant: Samsung Display Co., Ltd. ,  Samsung Electronics Co., Ltd.

Inventor： Sung-Mo GU ,  SUK CHOI ,  Youngjin NOH ,  YOUNGWON KIM ,  Changhyun RYU ,  CHI YOUN CHUNG

IPC: G02F1/13 ,  H01B13/00 ,  B05D1/00

CPC classification number: G02F1/1313 ,  G02F1/1309 ,  G02F1/1334 ,  G02F1/133553 ,  G02F2001/133368

Abstract: A substrate inspection apparatus includes a liquid crystal modulator configured to be provided on a substrate, a light source unit provided to be spaced apart from the liquid crystal modulator, a beam splitter provided between the liquid crystal modulator and the light source unit configured to reflect a beam of light from the light source to the liquid crystal modulator, and a measurement unit configured to sense the beam of light reflected by the substrate.

Abstract translation: 基板检查装置包括：液晶调制器，被配置为设置在基板上;光源单元，设置为与液晶调制器间隔开;光束分离器，设置在液晶调制器和光源单元之间，该光束分离器被配置为反射 从光源到液晶调制器的光束;以及被配置为感测由基板反射的光束的测量单元。