公开(公告)号：US20220285179A1

公开(公告)日：2022-09-08

申请号：US17685298

申请日：2022-03-02

Applicant: Samsung Display co., LTD. ,  ULVAC, INC.

Inventor： Kyung Hoon CHUNG ,  Masao NISHIGUCHI ,  Daisuke IWASE ,  Ki Jun ROH ,  Man Soo JANG

IPC: H01L21/67

Abstract: A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second direction that is perpendicular to the first direction; and a position conversion chamber connected to a first transport chamber among the transport chambers. The transport chambers include a rotational movement stage that rotates about a rotation axis that is perpendicular to the first direction and the second direction, and moves along a plane formed by the first direction and the second direction.