公开(公告)号：US20170330905A1

公开(公告)日：2017-11-16

申请号：US15397065

申请日：2017-01-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yong Suk Tak ,  Hong Bum Park ,  Won Oh Seo ,  Guk Hyon Yon ,  Ju Ri Lee

IPC: H01L27/146

CPC classification number: H01L27/1462 ,  H01L27/14621 ,  H01L27/14627

Abstract: A pixel array may include an array of microlenses, an array of photodetectors, and an array of color filters. The array of microlenses concentrate incoming light through respective filters in the array of color filters to respective photodetectors in the array of photodetectors. An anti-reflective layer is included between the photodetectors and color filters. The anti-reflective layer includes a first layer having a first index of refraction, a second layer closer to the color filter than the first layer having a second, higher, index of refraction, and a lattice adjusting layer between the first and second layers. The second layer includes a rutile phase TiO2 layer and the lattice adjusting layer includes a crystalline material having a lattice constant similar to that of the rutile phase TiO2 layer.