公开(公告)号：US20240242944A1

公开(公告)日：2024-07-18

申请号：US18351242

申请日：2023-07-12

申请人： Samsung Electronics Co., Ltd.

发明人： Haewook PARK ,  Juhyun KIM ,  Younsok CHOI

IPC分类号： H01J37/32

CPC分类号： H01J37/32917 ,  H01J2237/24564

摘要： A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.