公开(公告)号：US10424497B2

公开(公告)日：2019-09-24

申请号：US15628725

申请日：2017-06-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Bum-Soo Kim ,  Philwoong Jung ,  Yoonmi Lee ,  Hangryong Lim ,  Manyoung Shin ,  Young Hoon Son

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/00

Abstract: A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.