公开(公告)号：US20230238254A1

公开(公告)日：2023-07-27

申请号：US18080206

申请日：2022-12-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunho Kim ,  Heechul Park ,  Hyunwoo Kim ,  Yigil Cho ,  Jaeeun Song ,  Jinhyeok Jang

IPC: H01L21/67 ,  B01D71/56 ,  B01D69/10 ,  B01D69/02 ,  B01D69/04 ,  B01D69/14 ,  B01D71/26 ,  B01D63/06

CPC classification number: H01L21/67017 ,  B01D71/56 ,  B01D69/107 ,  B01D69/02 ,  B01D69/04 ,  B01D69/147 ,  B01D69/148 ,  B01D71/261 ,  B01D63/063 ,  B01D63/065 ,  B01D63/067 ,  B01D2325/04 ,  B01D2325/12 ,  B01D2319/025 ,  B01D2319/06

Abstract: A filter structure includes a housing having an inlet and an outlet; a first filter embedded in the housing and including a polymer membrane for filtering a first fluid flowing from the inlet into the housing; and a second filter embedded in the housing, filtering a second fluid filtered by the first filter, and including mesoporous silica nanoparticles (MSN).