公开(公告)号：US20230064941A1

公开(公告)日：2023-03-02

申请号：US17713541

申请日：2022-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taehyoung LEE ,  Hohyun LEE ,  Jongmin SONG ,  Young YOON ,  Jaemoo CHOI

IPC: H01L21/683 ,  B25J9/16 ,  H01L21/677 ,  H01L21/67

Abstract: A teaching apparatus includes a chamber; an electrostatic chuck in the chamber, the electrostatic chuck including a sidewall surrounding a loading area; an aligner configured to be loaded onto the loading area of the electrostatic chuck; a vision sensor configured to obtain measurement data by measuring separation distances of separation regions between the aligner and the sidewall of the electrostatic chuck and to transmit the measurement data; a transfer robot configured to load the aligner onto a reference position of the loading area and to position the vision sensor above the electrostatic chuck; and controller configured to reset the reference position and to equalize the separation distances based on the measurement data transmitted from the vision sensor.