公开(公告)号：US20240105469A1

公开(公告)日：2024-03-28

申请号：US18358160

申请日：2023-07-25

申请人： Samsung Electronics Co., Ltd.

发明人： Takashi Sasa ,  Kyoungwhan Oh ,  Hokyun Kim

IPC分类号： H01L21/67 ,  B01D19/00

CPC分类号： H01L21/67023 ,  B01D19/0031 ,  B01D19/0063 ,  B01D19/0068

摘要： A liquid supply system includes a liquid supply unit; a liquid pressurizer connected to the liquid supply unit; a compressor connected to the liquid pressurizer; a pump at a rear end of the liquid pressurizer to allow liquid to flow; an inflow control valve between the liquid supply unit and the liquid pressurizer; and an outflow control valve between the liquid pressurizer and the pump, wherein the liquid pressurizer is configured to supply liquid having a dissolved gas concentration that is lower than a dissolved gas concentration of liquid supplied from the liquid supply unit to the pump.