公开(公告)号：US20240028814A1

公开(公告)日：2024-01-25

申请号：US18348469

申请日：2023-07-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： QHwan KIM ,  Jaeyoon KIM ,  Hyeonkyun NOH ,  Ami MA ,  Sunghee LEE ,  Kyubaik CHANG ,  Wooyoung CHEON ,  Jaehoon JEONG

IPC: G06F30/398

CPC classification number: G06F30/398 ,  G06F2111/20

Abstract: A method for measuring a structure based on a spectrum, includes obtaining a first model that includes a first sub-model and a second sub-model following the first sub-model and is trained based on simulation data, generating a second model including a third sub-model identical to the first sub-model, training the second model based on sample spectrum data generated by measuring spectra of sample structures, and estimating, based on the trained second model, the structure from measured spectrum data generated by measuring a spectrum of the structure.

公开(公告)号：US20230062430A1

公开(公告)日：2023-03-02

申请号：US17890557

申请日：2022-08-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ami MA ,  Hyeonkyun NOH ,  Shinwook YI ,  Dongchul IHM ,  Kyubaik CHANG ,  Jaehoon JEONG

IPC: G06N20/00

Abstract: A device structure simulation apparatus includes a memory storing a device structure simulation program and a processor configured to execute the device structure simulation program stored in the memory. By executing the device structure simulation program, the device structure simulation apparatus is further configured to receive spectrum data of a target device, generate an input data set by performing preprocessing on the spectrum data, and train a model based on the input data set such that the model is configured to predict a structure of the target device. The preprocessing including selecting a certain basis function based on the spectrum data and separating the spectrum data into sets of certain basis functions, and the model includes at least one sub model.