-
公开(公告)号:US20210305114A1
公开(公告)日:2021-09-30
申请号:US17087879
申请日:2020-11-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: CHANHO LEE , WON KIM , HAESEOK PARK , ILGEUN JUNG , JINKUK BAE , INYOUNG LEE , SUNGDONG CHO
IPC: H01L23/31 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: A semiconductor package may include a base, a first chip on the base, and first connection patterns that connect and couple the base and the first chip. The first chip may include a substrate, pad patterns on the substrate, a passivation layer on the substrate and having openings, and pillars on the substrate, the pad patterns include a first signal pad and a second signal pad, the first connection patterns are in contact with the pillars, the pillars include a first signal pillar in contact with the first signal pad and a second signal pillar in contact with the second signal pad, the openings in the passivation layer include a first opening having a sidewall facing a side surface of the first signal pillar and surrounding the side surface of the first signal pillar, and a second opening having a sidewall facing a side surface of the second signal pillar and surrounding the side surface of the second signal pillar, and a maximum width of the second opening is greater than a maximum width of the first opening.