-
公开(公告)号:US09721950B2
公开(公告)日:2017-08-01
申请号:US15051860
申请日:2016-02-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jung-Gun You , Jae-Chul Kim
IPC: H01L27/088 , H01L29/78 , H01L29/423 , H01L29/40 , H01L21/8234
CPC classification number: H01L27/0886 , H01L21/823431 , H01L21/823437 , H01L21/823481 , H01L29/408 , H01L29/42364 , H01L29/785
Abstract: A semiconductor device including fin type patterns is provided. The semiconductor device includes a first fin type pattern, a field insulation layer disposed in vicinity of the first fin type pattern and having a first part and a second part, the first part protruding from the second part, a first dummy gate stack formed on the first part of the field insulation layer and including a first dummy gate insulation layer having a first thickness, and a first gate stack formed on the second part of the field insulation layer to intersect the first fin type pattern and including a first gate insulation layer having a second thickness different from the first thickness.