公开(公告)号：US20250076360A1

公开(公告)日：2025-03-06

申请号：US18823964

申请日：2024-09-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daesung JUNG ,  Seongbeom LEE ,  Gyouil JEONG ,  Sangyoon HAN ,  Myungjoon KIM ,  Kyuhwang WON ,  Jaein JEONG ,  Hoomi CHOI

IPC: G01R29/24 ,  H01L21/66 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687

Abstract: A substrate inspection apparatus includes a substrate support portion that fixedly holds a semiconductor substrate such that an upper surface and a lower surface of the semiconductor substrate are exposed; an upper inspection portion including an upper probe having a first end portion spaced apart from the upper surface, and an upper charge sensor in the first end portion that obtains an upper surface charge sensing value from the upper surface; and a lower inspection portion including a lower probe having a second end portion spaced apart from the lower surface, and a lower charge sensor in the second end portion that obtains a lower surface charge sensing value from the lower surface.