公开(公告)号：US20210140899A1

公开(公告)日：2021-05-13

申请号：US16887284

申请日：2020-05-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jangik PARK ,  Sungyoon RYU ,  Younghoon SOHN ,  Yusin YANG

IPC: G01N21/956 ,  G01N21/95 ,  G01N21/21

Abstract: A substrate inspection device including a light source, a polarizer, first and second compensators, an analyzer, a light splitter configured to receive reflected light reflected by the substrate to split the reflected light into first split light and second split light, a first detector and a second detector configured to detect the first split light and the second split light, respectively, and a controller configured to control the first and second detectors differently from each other, may be provided.