公开(公告)号：US20020158548A1

公开(公告)日：2002-10-31

申请号：US10086440

申请日：2002-03-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-hun Min ,  Hwan-young Choi ,  Hyung-jae Shin ,  Jeong-kwan Lee

IPC: G02F001/29 ,  G02B026/08

CPC classification number: G02B26/0841

Abstract: A micromirror driver for simultaneously and independently controlling a resonant frequency and an amplitude of a micromirror. A micromirror having a plurality of grooves is supported in rotation by an elastic body. Base electrodes having a comb shape are affixed to the grooves and along an edge of the micromirror. A plurality of driver electrodes also having a comb shape are respectively engaged with the base electrodes in a gear like arrangement to electrostatically interact with the micromirror in response to applied voltages. An amplitude and a frequency of the micromirror are controlled by varying a magnitude or a waveform of one or more electrode voltages or by varying a phase between voltages applied to at least two electrodes. Accordingly, greater driving forces, a larger rotation angle of the micromirror, and independent control of amplitude and resonant frequency of the micromirror are obtained.

Abstract translation: 用于同时且独立地控制微镜的谐振频率和振幅的微镜驱动器。 具有多个凹槽的微镜由弹性体旋转支撑。 具有梳形形状的基底电极被固定到凹槽和沿着微镜的边缘。 多个具有梳状形状的驱动电极分别与齿轮状布置的基体电极接合，以响应于施加的电压与微反射镜静电相互作用。 通过改变一个或多个电极电压的幅度或波形或通过改变施加到至少两个电极的电压之间的相位来控制微镜的振幅和频率。 因此，获得更大的驱动力，更大的微镜旋转角以及微镜的振幅和谐振频率的独立控制。