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    Micro mirror device and projector employing the same
    1.
    发明申请
    Micro mirror device and projector employing the same 失效
    微镜装置和投影机采用相同的

    公开(公告)号：US20030067590A1

    公开(公告)日：2003-04-10

    申请号：US10259562

    申请日：2002-09-30

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Hyung-jae Shin

    IPC: G03B021/28

    CPC classification number: H04N9/3108 ,  G02B26/0841

    Abstract: Provided are a micro mirror device capable of realizing color images without a color wheel by selectively reflecting color beams using a plurality of micro mirrors whose driving axes are positioned in different directions, and a projector employing the same. The micro mirror device can individually control a plurality of micro mirrors, the micro mirror device comprising a plurality of micro mirror units having micro mirrors whose driving axes are positioned at predetermined different angles, the micro mirror units for reflecting light incident in different directions. Also, the projector includes a light source for illuminating light; a light separation unit for separating light generated by the light source into several beams according to wavelength regions, and for reflecting or projecting the beams at different angles; a micro mirror device including a plurality of micro mirror units which are composed of a plurality of micro mirrors whose driving axes are respectively positioned at different predetermined angles, the micro mirror device for realizing an image by selectively reflecting the beams, which are passing through the light separation unit, in a predetermined direction and at a predetermined angle; and a projection lens unit for magnifying and projecting light generated by the micro mirror device toward a screen.

    Abstract translation: 提供一种能够通过使用驱动轴位于不同方向的多个微反射镜选择性地反射彩色光束而能够实现没有色轮的彩色图像的微反射镜装置，以及使用该微镜的投影仪。 微反射镜装置可以单独地控制多个微反射镜，该微镜装置包括多个具有微反射镜的微反射镜单元，微反射镜的驱动轴以预定的不同角度定位，微反射镜单元用于反射沿不同方向入射的光。 此外，投影仪包括用于照明光的光源; 光分离单元，用于将由光源产生的光根据波长区域分离成若干光束，并用于以不同的角度反射或突出光束; 微反射镜装置，包括多个微反射镜单元，其由驱动轴分别以不同的预定角度定位的多个微反射镜组成，所述微镜装置用于通过选择性地反射穿过所述光束的光束来实现图像 光分离单元，沿预定方向和预定角度; 以及用于将由微反射镜装置产生的光朝向屏幕放大和投影的投影透镜单元。

    Micromirror driver and method of controlling micromirror driver
    2.
    发明申请
    Micromirror driver and method of controlling micromirror driver 有权
    微镜驱动器和微镜驱动器的控制方法

    公开(公告)号：US20020158548A1

    公开(公告)日：2002-10-31

    申请号：US10086440

    申请日：2002-03-04

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Young-hun Min ,  Hwan-young Choi ,  Hyung-jae Shin ,  Jeong-kwan Lee

    IPC: G02F001/29 ,  G02B026/08

    CPC classification number: G02B26/0841

    Abstract: A micromirror driver for simultaneously and independently controlling a resonant frequency and an amplitude of a micromirror. A micromirror having a plurality of grooves is supported in rotation by an elastic body. Base electrodes having a comb shape are affixed to the grooves and along an edge of the micromirror. A plurality of driver electrodes also having a comb shape are respectively engaged with the base electrodes in a gear like arrangement to electrostatically interact with the micromirror in response to applied voltages. An amplitude and a frequency of the micromirror are controlled by varying a magnitude or a waveform of one or more electrode voltages or by varying a phase between voltages applied to at least two electrodes. Accordingly, greater driving forces, a larger rotation angle of the micromirror, and independent control of amplitude and resonant frequency of the micromirror are obtained.

    Abstract translation: 用于同时且独立地控制微镜的谐振频率和振幅的微镜驱动器。 具有多个凹槽的微镜由弹性体旋转支撑。 具有梳形形状的基底电极被固定到凹槽和沿着微镜的边缘。 多个具有梳状形状的驱动电极分别与齿轮状布置的基体电极接合，以响应于施加的电压与微反射镜静电相互作用。 通过改变一个或多个电极电压的幅度或波形或通过改变施加到至少两个电极的电压之间的相位来控制微镜的振幅和频率。 因此，获得更大的驱动力，更大的微镜旋转角以及微镜的振幅和谐振频率的独立控制。

    Micro mirror device and projector employing the same
    4.
    发明申请
    Micro mirror device and projector employing the same 失效
    微镜装置和投影机采用相同的

    公开(公告)号：US20040114110A1

    公开(公告)日：2004-06-17

    申请号：US10259563

    申请日：2002-09-30

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Hyung-jae Shin

    IPC: G03B021/00

    CPC classification number: G02B26/0841 ,  G03B21/28

    Abstract: A micro mirror device having a micro mirror that can slant with regard a plurality of rotation axes, and a projector employing such a micro mirror device, are provided. This micro mirror device includes a substrate; a plurality of address electrodes formed on the substrate, and a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, together with the address electrodes; and a holding plate including a central portion for supporting a second post that supports the micro mirrors and at least one spring hinges transforming elastically when the micro mirrors slant with regard to the rotation axes, the holding plate held by first posts of predetermined numbers which are formed on the bias electrode. The projector includes a light source for illuminating light; a light separator for branching light output from the light source into several beams according to a wavelength region, and reflecting or transmitting the beams at different angles; a micro mirror device for forming an image by rotating a micro mirror, which slants with regard to a plurality of rotation axes, in a predetermined direction or at a predetermined angle, and by selectively reflecting the beams separated from the light separator; and a projection lens unit for magnifying and transmitting beams output from the micro mirror device, so that the beams travel toward a screen.

    Abstract translation: 提供一种具有相对于多个旋转轴线可以倾斜的微反射镜的微型镜装置，以及采用这种微镜装置的投影仪。 该微反射镜装置包括基板; 形成在所述基板上的多个寻址电极和用于使所述微观镜相对于多个旋转轴线倾斜的偏置电极与所述寻址电极一起形成; 以及保持板，其包括用于支撑支撑微反射镜的第二柱的中心部分和当所述微观镜相对于所述旋转轴线倾斜时弹性铰链变形的至少一个弹簧铰链，所述保持板由预定数量的第一柱保持， 形成在偏置电极上。 该投影仪包括用于照明光的光源; 光分离器，用于将从光源输出的光分成根据波长区域的若干光束，并以不同的角度反射或透射光束; 微镜装置，用于通过旋转相对于多个旋转轴线在预定方向或预定角度倾斜的微反射镜形成图像，并且通过选择性地反射从光分离器分离的光束来形成图像; 以及用于放大和发射从微反射镜装置输出的光束的投影透镜单元，使得光束向屏幕移动。

    Wafer level hermetic sealing method
    7.
    发明申请
    Wafer level hermetic sealing method 失效
    晶圆级气密密封方法

    公开(公告)号：US20020113296A1

    公开(公告)日：2002-08-22

    申请号：US09984734

    申请日：2001-10-31

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Chang-ho Cho ,  Hyung-jae Shin ,  Woon-bae Kim

    IPC: H01L021/44 ,  H01L023/552

    CPC classification number: H01L23/10 ,  B81B7/0077 ,  B81C1/00269 ,  B81C1/00357 ,  B81C2201/019 ,  H01L21/50 ,  H01L24/48 ,  H01L2224/05599 ,  H01L2224/45099 ,  H01L2224/48227 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/16235 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207

    Abstract: A device that is hermetically sealed at a wafer level or a method of hermetically sealing a device, which is sensitive to high temperatures or affected by heating cycles. Semiconductor devices are formed on a wafer. A lid wafer is formed. Adhesives are formed in a predetermined position over the wafer and/or the lid wafer. The wafer and the lid wafer are sealed by the adhesives at the wafer level. The sealing may be performed at a low temperature using a solder to protect the devices sensitive to heat. The sealed devices are diced into individual chips. In the wafer level hermetic sealing method, a sawing operation is performed after the devices are sealed. Therefore, the overall processing time is reduced, devices are protected from the effects of moisture or particles, and devices having a moving structure, such as MEMS devices, are more easily handled.

    Abstract translation: 在晶片级气密密封的装置或密封装置的方法，其对高温敏感或受加热循环影响。 半导体器件形成在晶片上。 形成盖子晶片。 粘合剂形成在晶片和/或盖晶片上的预定位置。 晶片和盖晶片在晶片级被粘合剂密封。 可以使用焊料在低温下进行密封以保护对热敏感的装置。 将密封的装置切成单独的芯片。 在晶片级密封方法中，在密封装置之后进行锯切操作。 因此，总体处理时间减少，防止装置受潮湿或微粒的影响，并且具有诸如MEMS装置的移动结构的装置更容易处理。

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