公开(公告)号：US20190096659A1

公开(公告)日：2019-03-28

申请号：US16107942

申请日：2018-08-21

申请人： Samsung Electronics Co., Ltd.

发明人： Nuo Xu ,  Fan Chen ,  Weiyi Qi ,  Jongchol Kim ,  Jing Wang ,  Yang Lu ,  Woosung Choi

IPC分类号： H01L21/02 ,  G06F9/30 ,  G06N3/08

摘要： A system for reconstructing wafer maps of semiconductor wafers includes: a processor; and memory having instructions stored thereon that, when executed by the processor, cause the processor to: receive test data of a wafer at sparse sampling locations of the wafer, the sparse sampling locations being selected based on a probing mask; and compute a reconstructed wafer map by performing compressed sensing with Zernike polynomials on the test data at sparse locations of the wafer.

公开(公告)号：US11282695B2

公开(公告)日：2022-03-22

申请号：US16107942

申请日：2018-08-21

申请人： Samsung Electronics Co., Ltd.

发明人： Nuo Xu ,  Fan Chen ,  Weiyi Qi ,  Jongchol Kim ,  Jing Wang ,  Yang Lu ,  Woosung Choi

IPC分类号： H01L21/02 ,  G06N3/08 ,  G06F9/30 ,  G06N3/04 ,  G06N3/12

摘要： A system for reconstructing wafer maps of semiconductor wafers includes: a processor; and memory having instructions stored thereon that, when executed by the processor, cause the processor to: receive test data of a wafer at sparse sampling locations of the wafer, the sparse sampling locations being selected based on a probing mask; and compute a reconstructed wafer map by performing compressed sensing with Zernike polynomials on the test data at sparse locations of the wafer.