公开(公告)号：US20230031793A1

公开(公告)日：2023-02-02

申请号：US17724340

申请日：2022-04-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Hyun KIM ,  Joo Hyun JEON ,  Jae Seong PARK ,  Sung Jin KIM ,  Sung Duk HONG

IPC: G06F30/23

Abstract: A simulation system is provided. The simulation system comprises a processor, and a storage to store a simulation program that, when executed by the processor, causes the processor to, use a finite difference method (FDM) to calculate heat energy data generated by light energy provided to a simulation domain, receive the calculated heat energy data and use a finite-element method (FEM) to calculate temperature change data of the simulation domain over time and calculate phase change data of the simulation domain over time, and calculate a silicon loss of the simulation domain using the calculated temperature change data and the calculated phase change.