SIMULATION SYSTEM AND COMPUTER READABLE RECORDING MEDIUM

    公开(公告)号:US20230031793A1

    公开(公告)日:2023-02-02

    申请号:US17724340

    申请日:2022-04-19

    Abstract: A simulation system is provided. The simulation system comprises a processor, and a storage to store a simulation program that, when executed by the processor, causes the processor to, use a finite difference method (FDM) to calculate heat energy data generated by light energy provided to a simulation domain, receive the calculated heat energy data and use a finite-element method (FEM) to calculate temperature change data of the simulation domain over time and calculate phase change data of the simulation domain over time, and calculate a silicon loss of the simulation domain using the calculated temperature change data and the calculated phase change.

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