Semiconductor devices having contact plugs

    公开(公告)号:US12096615B2

    公开(公告)日:2024-09-17

    申请号:US18368939

    申请日:2023-09-15

    CPC classification number: H10B12/37 G11C5/10 H01L23/5226 H01L23/528 H01L28/60

    Abstract: A semiconductor device includes a substrate including a cell area having a first active region and a peripheral circuit area having a second active region, a direct contact contacting the first active region in the cell area, a bit line structure disposed on the direct contact, a capacitor structure electrically connected to the first active region, a gate structure disposed on the second active region in the peripheral circuit area, lower wiring layers disposed adjacent to the gate structure and electrically connected to the second active region, upper wiring layers disposed on the lower wiring layers, a wiring insulating layer disposed between the lower wiring layers and the upper wiring layers, and upper contact plugs connected to at least one of the lower wiring layers and the upper wiring layers and extending through the wiring insulating layer.

    Semiconductor devices having contact plugs

    公开(公告)号:US11785763B2

    公开(公告)日:2023-10-10

    申请号:US17568440

    申请日:2022-01-04

    CPC classification number: H10B12/37 G11C5/10 H01L23/528 H01L23/5226 H01L28/60

    Abstract: A semiconductor device includes a substrate including a cell area having a first active region and a peripheral circuit area having a second active region, a direct contact contacting the first active region in the cell area, a bit line structure disposed on the direct contact, a capacitor structure electrically connected to the first active region, a gate structure disposed on the second active region in the peripheral circuit area, lower wiring layers disposed adjacent to the gate structure and electrically connected to the second active region, upper wiring layers disposed on the lower wiring layers, a wiring insulating layer disposed between the lower wiring layers and the upper wiring layers, and upper contact plugs connected to at least one of the lower wiring layers and the upper wiring layers and extending through the wiring insulating layer.

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