公开(公告)号：US20240068922A1

公开(公告)日：2024-02-29

申请号：US18112241

申请日：2023-02-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang Wook CHOI ,  IIhwan KIM ,  Seokwhan CHUNG

IPC: G01N15/06

CPC classification number: G01N15/0637 ,  G01N2015/0046

Abstract: A sensor device includes: a support structure having a cantilever shape extending in a first direction and having a first end fixed; a sensing element having a surface and a resonant frequency changing according to contaminants adsorbed to the surface and disposed at a second end of the support structure; a frequency detector configured to detect the resonant frequency of the sensing element; and an actuator disposed at the one end of the support structure and configured to move the support structure so that the second end of the support structure moves in a second direction perpendicular to the first direction.