SENSOR DEVICE AND OPERATING METHOD THEREOF
    2.
    发明公开

    公开(公告)号:US20240068922A1

    公开(公告)日:2024-02-29

    申请号:US18112241

    申请日:2023-02-21

    CPC classification number: G01N15/0637 G01N2015/0046

    Abstract: A sensor device includes: a support structure having a cantilever shape extending in a first direction and having a first end fixed; a sensing element having a surface and a resonant frequency changing according to contaminants adsorbed to the surface and disposed at a second end of the support structure; a frequency detector configured to detect the resonant frequency of the sensing element; and an actuator disposed at the one end of the support structure and configured to move the support structure so that the second end of the support structure moves in a second direction perpendicular to the first direction.

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