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公开(公告)号:US20220131444A1
公开(公告)日:2022-04-28
申请号:US17536447
申请日:2021-11-29
发明人: Hansang KIM , Yongsuk KWAK , Eungkyu PARK , Dongyeop LEE , Changhoon IM , Kwangil KIM , Hwagyu SONG , Jin YOU , Sungcheol LEE , Hyounggil CHOI
摘要: According to an embodiment of the disclosure, a motor assembly may include a stator including a coil; a rotor accommodated inside the stator and configured to rotate; first and second housings coupled to first and second sides of the stator; an impeller disposed in a first direction of the first housing and configured to rotate together with the rotor by being coupled to one side of the rotor; a cover having an opening through which air is introduced by rotation of the impeller, and configured to protect the impeller; and a heat dissipation member surrounding at least a portion of an outer surface of the stator and configured to reduce heat generated in the motor assembly as the rotor rotates. Therefore, it is possible to minimize vibration caused by the rotation of the motor, thereby reduce noise, and lower heat generated inside the motor. Other various embodiments are possible.
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公开(公告)号:US20210159101A1
公开(公告)日:2021-05-27
申请号:US16926956
申请日:2020-07-13
发明人: Daesung JUNG , Kwangil KIM
IPC分类号: H01L21/67 , H01L21/677
摘要: A semiconductor substrate treatment system includes: a chamber having an internal space defined by a first surface and a second surface of the chamber opposing each other, and a third surface of the chamber connected the first surface and the second surface; a transfer device in a central region of the internal space for transferring a semiconductor substrate; an ionizing device including first and second discharge devices on the second surface for emitting ions having a first polarity and a second polarity, respectively, to charge particles in the internal space with the first and second polarities, and a third discharge device disposed above the transfer device, and configured to emit ions having the first and second polarities together; and first and second dust collecting assemblies on the third surface, facing each other, and configured to collect charged particles by generating electric fields having different polarities.
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