公开(公告)号：US20180214126A1

公开(公告)日：2018-08-02

申请号：US15745100

申请日：2015-07-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young Il KIM ,  Kyung Il CHO ,  Bae Hyung KIM ,  Jong Keun SONG ,  Eun Sung LEE ,  Min Seog CHOI

IPC: A61B8/00 ,  B06B1/02 ,  G01N29/24

CPC classification number: A61B8/4488 ,  A61B8/4405 ,  A61B8/4494 ,  B06B1/0207 ,  B06B1/0292 ,  G01N29/2406

Abstract: Disclosed is a Capacitive Micromachined Ultrasonic Transducer (cMUT) including: an anchor; and a membrane coupled with the anchor, wherein the anchor includes at least one anchor groove. According to the cMUT, a probe, and a method of manufacturing the probe, it is possible to widen a contact area between the cMUT and a lens. Accordingly, it is possible to increase the interfacial strength between the cMUT and the lens while protecting the membrane of the cMUT. Also, the peeling phenomenon of the lens can be prevented, and the durability of transducers can be improved.