VARIABLE RESISTANCE MEMORY DEVICE
    1.
    发明申请

    公开(公告)号:US20200066978A1

    公开(公告)日:2020-02-27

    申请号:US16423557

    申请日:2019-05-28

    Abstract: A variable resistance memory device includes an interlayer insulating structure on a substrate, the interlayer insulating structure having a hole, a bottom electrode in a lower portion of the hole, and a pattern in an upper portion of the hole, the pattern including at least one of a phase change pattern or an intermediate electrode, a sidewall of the pattern defining an angle with a top surface of the substrate, and the angle decreasing as a vertical distance from the substrate increases.

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