公开(公告)号：US20190295616A1

公开(公告)日：2019-09-26

申请号：US15933659

申请日：2018-03-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eunsun NOH ,  Juhyun KIM ,  Ung Hwan Pl ,  Ferenc Z VAJDA ,  Rachid MAFHOUM

IPC: G11C11/16 ,  H01L43/12 ,  H01L43/10 ,  G01R33/09

Abstract: A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.