公开(公告)号：US11605567B2

公开(公告)日：2023-03-14

申请号：US17212914

申请日：2021-03-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jitae Park ,  Youngjoo Lee ,  Taekyun Kang ,  Doo Young Gwak ,  Aekyung Kim ,  Hyowon Bae ,  Kyunggon You ,  Seongjin In ,  Sang Yoon Han

IPC: H01L21/66 ,  H01J37/32

Abstract: Disclosed are a method of monitoring a semiconductor device fabrication process and a method of fabricating a semiconductor device using the same. The monitoring method may include determining a normalization range of a target byproduct, which is a measurement target of byproducts produced in a chamber by an etching process, the byproducts including the target byproduct and a non-target byproduct, the target byproduct including first and second target byproducts, which are respectively produced by and before the etching process on a to-be-processed layer, obtaining a first index from a ratio of the target byproduct to the non-target byproduct, obtaining a second index by subtracting an emission intensity of the second target byproduct from the first index, obtaining a third index by integrating the second index on a time interval, and estimating a result of the etching process and presence or absence of a failure, based on the third index.

公开(公告)号：US11216974B2

公开(公告)日：2022-01-04

申请号：US16768765

申请日：2017-12-14

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION

Inventor： Chi-yul Yoon ,  Sang Yoon Han ,  Sang Hwa Lee ,  Yeongil Jang ,  Nam Ik Cho

IPC: G06T7/73 ,  G06T7/564 ,  G06K9/00

Abstract: The disclosure relates to a method of determining a gaze distance, the method including obtaining a plurality of images by capturing each of both eyes of a user, determining, from each of the plurality of images, a corner point located at an edge of the eye, a location of a pupil, and an eye contour, determining each of gaze directions of both of the eyes based on a difference between a reference point and the location of the pupil, wherein the reference point is determined based on the eye contour and a location of the corner point, and determining a gaze distance based on a difference between the gaze directions of both of the eyes.