-
公开(公告)号:US12229936B2
公开(公告)日:2025-02-18
申请号:US17721616
申请日:2022-04-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ho Joon Lee , Il Kwon Kim , Sang Gul Park , Chang Wook Jeong , Moon Hyun Cha , Sat Byul Kim
Abstract: Some example embodiments relate to a super resolution scanning electron microscope (SEM) image implementing device and/or a method thereof. Provided a super resolution scanning electron microscope (SEM) image implementing device comprising a processor configured to crop a low resolution SEM image to generate a first cropped image and a second cropped image, to upscale the first cropped image and the second cropped image to generate a first upscaled image and a second upscaled image, and to cancel noise from the first upscaled image and the second upscaled image to generate a first noise canceled image and a second noise canceled image.