公开(公告)号：US20200083063A1

公开(公告)日：2020-03-12

申请号：US16371461

申请日：2019-04-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung-Min SHIN ,  Seok-Hoon KIM ,  Young-Hoo KIM ,  In-Gi KIM ,  Tae-Hong KIM ,  Sung-Hyun PARK ,  Jin-Woo LEE ,  Ji-Hoon CHA ,  Yong-Jun CHOI

IPC: H01L21/67 ,  H01L21/02 ,  H01J37/32 ,  G02B27/09 ,  B08B7/00 ,  B23K26/352

Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

公开(公告)号：US20210343552A1

公开(公告)日：2021-11-04

申请号：US17376369

申请日：2021-07-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung-Min SHIN ,  Seok-Hoon KIM ,  Young-Hoo KIM ,  In-Gi KIM ,  Tae-Hong KIM ,  Sung-Hyun PARK ,  Jin-Woo LEE ,  Ji-Hoon CHA ,  Yong-Jun CHOI

IPC: H01L21/67 ,  H01L21/02 ,  H01J37/32 ,  G02B27/09 ,  B23K26/352 ,  B08B7/00

Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.