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公开(公告)号:US20250089394A1
公开(公告)日:2025-03-13
申请号:US18627797
申请日:2024-04-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Young Woo CHUNG , Soo Eon KIM , Yo Seph KIM , Chan Hyeon SEONG
IPC: H01L27/146
Abstract: An image sensor and a manufacturing method thereof are provided. The image sensor includes a substrate including first and second surfaces opposed to each other, a first pixel group in the substrate including a first to forth unit pixels adjacent to one another in a plan view, a photoelectric conversion area in the first to fourth unit pixels, a first isolation trench in the substrate surrounding the first pixel group, a second isolation trench in the substrate between the first unit pixel and the fourth unit pixel and between the second unit pixel and the third unit pixel, the second isolation trench in contact with the second surface of the substrate, and a first color filter on the second surface of the substrate covering the first pixel group.