公开(公告)号：US20230074302A1

公开(公告)日：2023-03-09

申请号：US17826320

申请日：2022-05-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunje CHO ,  Subong SHON ,  Myungjun LEE ,  Taehyoung LEE ,  Yeny YIM

IPC: G06T7/00 ,  G06V10/77 ,  G06T7/73 ,  G06T1/20

Abstract: A scanning electron microscope (SEM) device includes: an electron beam source configured to emit an electron beam; a lens unit disposed between the electron beam source and a stage configured to seat an object including structures having a pattern is seated, and including a scanning coil, the scanning coil configured to generate an electromagnetic field to provide a lens, and an astigmatism adjuster; and a control unit. The control unit is configured to change a working distance between the lens unit and the object to obtain a plurality of original images, obtain a pattern image, in which the structures appear, and a plurality of kernel images, in which a distribution of the electron beam on the object appears, from the plurality of original images, and control the astigmatism adjuster to adjust the focus and the astigmatism of the lens unit using feature values extracted from the plurality of kernel images.

公开(公告)号：US20240355580A1

公开(公告)日：2024-10-24

申请号：US18471259

申请日：2023-09-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yeny YIM ,  Dongok KIM ,  Wonhee LEE ,  Subong SHON ,  Hansaem PARK ,  Byeongkyu CHA

IPC: H01J37/26 ,  G06T5/50 ,  G06T7/13 ,  G06T7/60 ,  G06V20/70

CPC classification number: H01J37/26 ,  G06T5/50 ,  G06T7/13 ,  G06T7/60 ,  G06V20/70 ,  G06T2207/10056 ,  G06T2207/20104 ,  G06T2207/20221

Abstract: A method of operating a transmission electron microscope (TEM) image processing apparatus, includes acquiring a TEM image from a TEM facility, performing weak labeling of the TEM image, generating ground truth for a partially labeled TEM image using a guide model, performing segmentation using training data consisting of a pair of the TEM image and the ground truth; measuring a device core structure according to a result of the segmentation, and visualizing a measurement result according to the device core structure, and storing the same in a database.