公开(公告)号：US11182518B2

公开(公告)日：2021-11-23

申请号：US16127692

申请日：2018-09-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sang Yub Ie ,  Jung Geun Jee ,  Sung Youn Chung ,  Jae Myung Choe

IPC: G06F30/20 ,  C23C16/455 ,  G06F30/17

Abstract: An apparatus for generating 3D shape data of a showerhead includes: a data processor that generates data sets comprising information indicating values of a first distance between an upper surface of a wafer and a showerhead, information indicating positions on the wafer and information about a fluid flow physical quantity value and determines a function representing a relationship among the various information; an input unit that receives condition data comprising a target fluid flow physical quantity value for each of the positions; and a database that stores information about the function. The data processor obtains information about a second distance, which has the target fluid flow physical quantity value, between the upper surface of the wafer and the showerhead at each of the positions, extracts spatial coordinate information of a lower surface of the showerhead, and generates 3D shape data of the showerhead using the spatial coordinate information.

公开(公告)号：US20190228120A1

公开(公告)日：2019-07-25

申请号：US16127692

申请日：2018-09-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sang Yub Ie ,  Jung Geun Jee ,  Sung Youn Chung ,  Jae Myung Choe

IPC: G06F17/50 ,  C23C16/455

Abstract: An apparatus for generating 3D shape data of a showerhead includes: a data processor that generates data sets comprising information indicating values of a first distance between an upper surface of a wafer and a showerhead, information indicating positions on the wafer and information about a fluid flow physical quantity value and determines a function representing a relationship among the various information; an input unit that receives condition data comprising a target fluid flow physical quantity value for each of the positions; and a database that stores information about the function. The data processor obtains information about a second distance, which has the target fluid flow physical quantity value, between the upper surface of the wafer and the showerhead at each of the positions, extracts spatial coordinate information of a lower surface of the showerhead, and generates 3D shape data of the showerhead using the spatial coordinate information.