公开(公告)号：US20250155814A1

公开(公告)日：2025-05-15

申请号：US18751464

申请日：2024-06-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Chulmin Cho ,  Youngho Hwang ,  Juno Park ,  Kyoungwhan Oh ,  Sunyoung Yun ,  Youngkyun Im ,  Jaehong Lim ,  Seok Heo

IPC: G03F7/16 ,  B05C11/08

Abstract: A spin coating apparatus according to an embodiment includes a substrate supporter supporting a substrate, a substrate supporter driver rotating the substrate supporter, a laser supply unit disposed on the substrate supporter and providing a laser, and a laser driver of driving the laser supply unit, wherein the laser supply unit may move along a first direction, which is horizontal to the substrate surface on the substrate supporter.